等离子体发生器用高压直流电源研制
首发时间:2022-03-25
摘要:高压直流电源驱动等离子体发生器时,上电或调压过程中可能由于负载特性而发生过电压。为了减轻这种过电压的影响,本文研制了一种新的高压直流电源。该电源不仅能提供常规的高压直流输出,还可以通过特定的控制电路对开关器件驱动信号的变化速度进行调控,从而实现缓速调压功能,有助于减小过电压。而同样由控制电路实现的过压保护功能则可以在电压过高时终止高压输出,对电源与负载起到保护作用。除以上主要功能之外,电源还具备定时停止为等离子体发生器供电的能力,适用于等离子体处理时长固定的使用场合。电源搭建完成后,性能测试表明该电源能够输出0-8kV可调的直流高压并驱动等离子体发生装置,且各项功能均得以实现。
关键词: 高电压试验设备及测量技术 高压直流电源 过电压 等离子体发生器
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Development of HVDC power supply for plasma generators
Abstract:When a plasma generator is driven by a high voltage DC power supply, the load characteristics might contribute to overvoltage in startup process or voltage regulation process. To reduce the influence of overvoltage, a novel high voltageDC power supply was developed in this study. Apart from providing high voltageDC output, the power supply could also adjust the change speed of IGBT drive signal through a specific control circuit. Therefore, the function of regulating voltage smoothly could be realized and the overvoltage could be reduced. Besides, the overvoltage protection could terminate high voltageDC output when severe overvoltage existed, so as to protect the power supply and the loads. In addition to the main functions, the power supply had the ability to stop the voltage output for the plasma generator at a preset time, which was conducive to experiments with fixed plasma treatment time. After the establishment of the high voltageDC power supply, the performance test showed that the power supply could provide adjustable high voltageDC (0-8 kV) to drive the plasma generator, and all designed functions were realized.
Keywords: high voltage test equipment and measurement technology high voltage DC power supply overvoltage plasma generator
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