Solid electrolyte and anodic properties of the polymer AL

• 1、School of Materials Science and Engineering,Taiyuan University of Science and Technology,Taiyuan030024,China

Abstract：In order to improve the packaging of MEMS technology, the use of solid polymer electrolyte (PEO-LiClO4) and AL anodic bonding method closure. Through analysis of the experimental process parameters, voltage and preheating temperature bonding influence transport number of lithium ions and conductivity, and electrical conductivity is good or bad is the key to the bonding, infrared spectroscopy (FTIR) described polymer solid electrolyte the conductive mechanism, namely Li + first and then with CO dissociation ClO4- produce complex. X-ray diffraction (XRD) analysis with respect to the response in terms of LiClO4 and LiPF6 and LiBF4 PEO occurred weakened complex structure, making complex structure is loose, in the role of a strong electrostatic field to promote the proliferation and migration of lithium ions. By scanning electron microscopy (SEM) observations, ultra deep microscopic observation, dispersive spectroscopy (EDS) of the bonded interface analysis shows that the transition layer is the key to produce the weld.

Keywords： solid polymer electrolyte (SPE) anodic bonding the transition layer