电子束蒸发制备用于薄膜太阳能电池的硫化镉多晶薄膜
首发时间:2012-04-06
摘要:利用电子束蒸发方法,在P型硅及玻璃衬底上制备了硫化镉(CdS)多晶薄膜。对不同衬底温度制备的样品,通过XRD ,AFM,光学透过率谱和吸收谱等测试手段研究了CdS 多晶薄膜结构和光电性能。结果表明,CdS薄膜表面均匀、致密,均表现出沿<002>晶向的择优生长,随着衬底温度的升高,晶粒尺寸增大,择优取向增强。CdS薄膜的光学带隙在2.42-2.48 eV之间,随着衬底温度的升高而降低。CdS多晶薄膜与P型硅衬底形成的异质结表现出良好的整流特性和光伏效应,适合作为薄膜太阳能电池的窗口层。
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Electron beam evaporated cadmium sulphide thin films for solar cell applications
Abstract:Cadmium sulphide (CdS) thin films were deposited by electron beam evaporation at different substrate temperatures. The structural characteristics were studied by the X-ray diffraction (XRD) pattern. The CdS films are polycrystalline, exhibiting a preferred orientation along the (002) plane. Atomic force microscopy (AFM) reveals that the root mean square (RMS) roughness of the films increases as the substrate temperature increases. The optical band gap values of CdS films decrease slightly with the increasing substrate temperature, in the range of 2.42-2.48 eV. The electrical characteristics of CdS/p-Si heterojunctions were investigated in dark condition and under illumination. Excellent rectifying and photovoltaic properties were observed.
Keywords: Cadmium sulphide electron beam evaporation substrate temperature solar cell
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